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Uhv Rotating Fluid Delivery System
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High-vacuum Valve With Retractable Valve Plate To Eliminate Abrasion
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A1Application Publication No. 20040079915, Issued April 29, 2004
High-vacuum Valve With Retractable Valve Plate To Eliminate Abrasion
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High Power Radio Frequency Energy Feedthrough For High Vacuum Vessel
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B1Utility Patent No. 4841098, Issued June 20, 1989
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