Koh, Cha Won
 United States
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Outside Counsel (206)
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Christian |
A. |
Hickman Palermo Truong & Becker, LLP |
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Absher |
Alton |
L. |
Kilpatrick Townsend & Stockton, LLP |
Winston-salem, Nc, |
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Alemanni |
John |
C. |
Kilpatrick Townsend & Stockton, LLP |
Winston-salem, Nc, |
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Allen |
Eben |
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Kilpatrick Townsend & Stockton, LLP |
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Allen |
Kenneth |
R. |
Kilpatrick Townsend & Stockton, LLP |
Palo Alto, CA |
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Amanat |
Houtan |
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Kilpatrick Townsend & Stockton, LLP |
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Annis |
David |
C. |
Kilpatrick Townsend & Stockton, LLP |
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Anthony |
Peter |
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Kilpatrick Townsend & Stockton, LLP |
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Apple |
Randolph |
Ted |
Kilpatrick Townsend & Stockton, LLP |
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Artuz |
Robert |
John |
Kilpatrick Townsend & Stockton, LLP |
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Auchterlonie |
Thomas |
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Kilpatrick Townsend & Stockton, LLP |
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Baldwin |
Randall |
K. |
Kilpatrick Townsend & Stockton, LLP |
Washington, DC |
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Balun |
Matthew |
J. |
Kilpatrick Townsend & Stockton, LLP |
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Barrish |
Mark |
D. |
Kilpatrick Townsend & Stockton, LLP |
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Basarkar |
Girish |
M. |
Kilpatrick Townsend & Stockton, LLP |
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Bastian |
Kevin |
L. |
Kilpatrick Townsend & Stockton, LLP |
San Francisco, CA |
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Belagodu |
Akarsh |
P. |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Bennett |
Jesse |
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Kilpatrick Townsend & Stockton, LLP |
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Bergstrom |
James |
T. |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Bernard |
Eugene |
J. |
Oblon, Spivak, McClelland, Maier & Neustadt,... |
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Bertelson |
Michael |
Allen |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Blackburn |
Jennifer |
L. |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Blake |
Vanessa |
M. |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Boring |
Landin |
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Kilpatrick Townsend & Stockton, LLP |
Seattle, WA |
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Bowers |
Carl |
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Kilpatrick Townsend & Stockton, LLP |
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Boyd |
David |
W. |
Kilpatrick Townsend & Stockton, LLP |
San Francisco, CA |
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Brown |
Kyle |
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Kilpatrick Townsend & Stockton, LLP |
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Brown |
Theodore |
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Kilpatrick Townsend & Stockton, LLP |
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Bussey |
Megan |
Elizabeth |
Kilpatrick Townsend & Stockton, LLP |
Ny 10036, |
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Calkins |
Charles |
W. |
United States Army Corps of Engineers |
FT. BELVOIR, DC |
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Cassell |
Nathan |
S. |
Kilpatrick Townsend & Stockton, LLP |
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Catmull |
Kelvin |
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Kilpatrick Townsend & Stockton, LLP |
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Chang |
James |
K. |
Rothwell, Figg, Ernst & Manbeck, PC |
Washington, DC |
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CHANG |
KO-FANG |
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Kilpatrick Townsend & Stockton, LLP |
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Chang |
Shin-Tsen |
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Electronic Arts, Inc. |
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Choi |
Wendy |
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Kilpatrick Townsend & Stockton, LLP |
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Christiansen |
Richard |
B. |
Kilpatrick Townsend & Stockton, LLP |
San Diego, CA |
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Clark |
Kevin |
Michael |
Kilpatrick Townsend & Stockton, LLP |
San Diego, CA |
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Colwell. |
Robert |
C. |
Kilpatrick Townsend & Stockton, LLP |
San Francisco, CA |
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Connor |
Jeffrey |
Matthew |
Kilpatrick Townsend & Stockton, LLP |
DENVER, CO |
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Cook |
Roger |
L. |
Kilpatrick Townsend & Stockton, LLP |
San Francisco, CA |
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Crall |
Kristin |
Mallatt |
Kilpatrick Townsend & Stockton, LLP |
Palm City, FL |
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Cretsinger |
Cathy |
E. |
Kilpatrick Townsend & Stockton, LLP |
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Crookston |
Matthew |
B. |
Kilpatrick Townsend & Stockton, LLP |
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Curylo |
Robert |
J. |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Dailey |
Robert |
S. |
Kilpatrick Townsend & Stockton, LLP |
Washington, DC |
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Daley |
William |
J. |
Merchant & Gould, PC |
Minneapolis, MN |
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Dave |
Urmil |
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Kilpatrick Townsend & Stockton, LLP |
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Davis |
Kimberlynn |
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Kilpatrick Townsend & Stockton, LLP |
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Dobson |
Allison |
W. |
Kilpatrick Townsend & Stockton, LLP |
Winston-salem, Nc, |
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Dodson |
Richard |
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Kilpatrick Townsend & Stockton, LLP |
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Doyle |
Kristin |
L. |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Durkee |
Christopher |
M. |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Eurek |
Justin |
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Kilpatrick Townsend & Stockton, LLP |
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Ewing |
James |
Lindsay |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Feld |
Nathan |
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Kilpatrick Townsend & Stockton, LLP |
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Fernandez |
Lizette |
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Kilpatrick Townsend & Stockton, LLP |
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Ferrario |
Matias |
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Kilpatrick Townsend & Stockton, LLP |
Winston-salem, Nc, |
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Flanagan. |
Lisa |
Dornbach |
Kilpatrick Townsend & Stockton, LLP |
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Foster |
Bryan |
Stuart |
Kilpatrick Townsend & Stockton, LLP |
Winston-salem, Nc, |
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Franklin |
Thomas |
D. |
Kilpatrick Townsend & Stockton, LLP |
San Francisco, CA |
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Gao |
Chuan |
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Kilpatrick Townsend & Stockton, LLP |
San Francisco, CA |
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Gardner |
Jason |
Delmon |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Gardner |
John |
Steven |
Kilpatrick Townsend & Stockton, LLP |
WINSTON-SALEM, NC |
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Garrett-Wackowski |
Euginia |
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Kilpatrick Townsend & Stockton, LLP |
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Gaudry |
Katherine |
S. |
Kilpatrick Townsend & Stockton, LLP |
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Gavin |
Geoffrey |
Kirkland |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Gee |
Tyler |
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Kilpatrick Townsend & Stockton, LLP |
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Ghazanfari |
Faryar |
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Kilpatrick Townsend & Stockton, LLP |
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Gibby |
Darin |
J. |
Kilpatrick Townsend & Stockton, LLP |
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Giordano-Coltart |
Jennifer |
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Kilpatrick Townsend & Stockton, LLP |
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Goetz. |
David |
H. |
Kilpatrick Townsend & Stockton, LLP |
SAN FRANCISCO, CA |
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Golladay |
James II |
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Kilpatrick Townsend & Stockton, LLP |
Ca, |
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Grab |
Leslie |
Thomas |
Kilpatrick Townsend & Stockton, LLP |
Winston-salem, Nc, |
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Graham |
Jamie |
L. |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Grant |
Bonnie |
Marie |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Gray |
Charles |
W. |
Kilpatrick Townsend & Stockton, LLP |
DENVER, CO |
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Hall |
David |
A. |
Pretty & Schroeder, PC |
Los Angeles, CA |
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Hao |
Joe |
Chao-peng |
Kilpatrick Townsend & Stockton, LLP |
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Harris |
Jonathan |
Ernest |
Kilpatrick Townsend & Stockton, LLP |
Winston-salem, Nc, |
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Harris |
Tywanda |
L. |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Hart |
Catherine |
E. |
Kilpatrick Townsend & Stockton, LLP |
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Haughey |
Paul |
D. |
Kilpatrick Townsend & Stockton, LLP |
San Francisco, CA |
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Henderson |
Mymy |
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Kilpatrick Townsend & Stockton, LLP |
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Hetzer-egger |
Claudia |
H. |
Kilpatrick Townsend & Stockton, LLP |
San Diego, CA |
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Hindman |
Matthew |
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Kilpatrick Townsend & Stockton, LLP |
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Hinsch. |
Matthew |
E. |
Kilpatrick Townsend & Stockton, LLP |
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Hokamura |
Aaron |
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Kilpatrick Townsend & Stockton, LLP |
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Hollister |
Matthew |
A. |
Kilpatrick Townsend & Stockton, LLP |
DENVER, CO |
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Holloway |
David |
Clayton |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Holmes |
Brenda |
Ozaki |
Kilpatrick Townsend & Stockton, LLP |
Atlanta, GA |
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Holt |
Benjamin |
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Kilpatrick Townsend & Stockton, LLP |
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Hopkins |
Mark |
H. |
Kilpatrick Townsend & Stockton, LLP |
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Howard |
James |
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Kilpatrick Townsend & Stockton, LLP |
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Hsueh |
Hain-Whei |
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Kilpatrick Townsend & Stockton, LLP |
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Hull |
Michael |
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Coudert Brothers |
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Hylton |
Roger |
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Kilpatrick Townsend & Stockton, LLP |
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Jarvis |
Peter |
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Sharp Kabushiki Kaisha |
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Jenkins |
Kenneth |
E. |
Kilpatrick Townsend & Stockton, LLP |
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Jensen |
Philip |
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Kilpatrick Townsend & Stockton, LLP |
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7/19/2024 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
18777777
20250093772 |
Photoresist Compositions And Methods Of Forming Patterns Using A Photore...
Photoresist Compositions And Methods Of Forming Patterns Using A Photore... |
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12/18/2023 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
18543114
20240255845 |
Photoresist Composition
Photoresist Composition |
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8/16/2023 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
18449156
20240255848 |
Semiconductor Photoresist Composition And Method Of Forming Patterns Usi...
Semiconductor Photoresist Composition And Method Of Forming Patterns Usi... |
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7/18/2023 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
18344992
20240210832 |
Photoresist Topcoat Composition, And Method Of Forming Patterns Using Th...
Photoresist Topcoat Composition, And Method Of Forming Patterns Using Th... |
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3/24/2023 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
18125923
20230314956 |
Substrate Processing Method
Substrate Processing Method |
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3/10/2023 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
18120248
20230400764 |
Organometallic Compound Comprising A Metal Combined With At Least One Li...
Organometallic Compound Comprising A Metal Combined With At Least One Li... |
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3/10/2023 |
Inha University Research And Business Fo... |
Assignee |
Application
Publication |
18120248
20230400764 |
Organometallic Compound Comprising A Metal Combined With At Least One Li...
Organometallic Compound Comprising A Metal Combined With At Least One Li... |
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1/8/2021 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
17144242
20210380612 |
Photoresist Compositions
Photoresist Compositions |
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8/18/2020 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
16996372
20220059345 |
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8/18/2020 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Application |
16996372
20220059345
12112948 |
Method Of Manufacturing Integrated Circuit Device Using A Metal-containi...
Method Of Manufacturing Integrated Circuit Device Using A Metal-containi... |
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5/24/2019 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Patent |
16420776
11189503 |
Integrated prescription offer program and apparatus
Substrate Drying Method, Photoresist Developing Method, Photolithography... |
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4/30/2019 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
16399473
20200348594 |
Photoresist Compositions And Methods For Fabricating Semiconductor Devic...
Photoresist Compositions And Methods For Fabricating Semiconductor Devic... |
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10/25/2018 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
16170665
20190206872 |
Semiconductor Device And Method Of Manufacturing The Same
Semiconductor Device And Method Of Manufacturing The Same |
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10/25/2018 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
16170665
20190206872
10586798 |
Semiconductor Device And Method Of Manufacturing The Same
Semiconductor Device And Method Of Manufacturing The Same
Semiconductor Device And Method Of Manufacturing The Same |
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9/17/2018 |
Samsung Electronics Company, Ltd |
Assignee |
Application
Publication |
16122454
20190232227 |
Filter Structure For Chemical Solution Used In Manufacturing Integrated ...
Filter Structure For Chemical Solution Used In Manufacturing Integrated ... |
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9/17/2018 |
Samsung Electronics Company, Ltd |
Assignee |
Application
Publication
Patent |
16122454
20190232227
10688437 |
Filter Structure For Chemical Solution Used In Manufacturing Integrated ...
Filter Structure For Chemical Solution Used In Manufacturing Integrated ...
Filter Structure For Chemical Solution Used In Manufacturing Integrated ... |
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9/6/2016 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
15243128
20170125257 |
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9/6/2016 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Application |
15243128
20170125257
10438810 |
Method Of Forming Photoresist Pattern And Method Of Fabricating Semicond...
Method Of Forming Photoresist Pattern And Method Of Fabricating Semicond... |
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8/23/2016 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
15243128
20170125257 |
Method Of Forming Photoresist Pattern And Method Of Fabricating Semicond...
Method Of Forming Photoresist Pattern And Method Of Fabricating Semicond... |
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8/23/2016 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
15243128
20170125257
10438810 |
Method Of Forming Photoresist Pattern And Method Of Fabricating Semicond...
Method Of Forming Photoresist Pattern And Method Of Fabricating Semicond...
Method Of Forming Photoresist Pattern And Method Of Fabricating Semicond... |
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7/19/2016 |
Samsung Electronics Company, Ltd |
Assignee |
Application
Publication |
15183541
20170010531 |
Photoresist Composition For Extreme Ultraviolet And Method Of Forming Ph...
Photoresist Composition For Extreme Ultraviolet And Method Of Forming Ph... |
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7/19/2016 |
Samsung Electronics Company, Ltd |
Assignee |
Application
Publication
Patent |
15183541
20170010531
10353290 |
Photoresist Composition For Extreme Ultraviolet And Method Of Forming Ph...
Photoresist Composition For Extreme Ultraviolet And Method Of Forming Ph...
Photoresist Composition For Extreme Ultraviolet And Method Of Forming Ph... |
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2/19/2016 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
15047659
20160358778 |
Methods Of Forming Patterns Using Photoresists
Methods Of Forming Patterns Using Photoresists |
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2/19/2016 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
15047659
20160358778
9772555 |
Apparatus and Method For Accurately Measuring Flow of a Multi-Component ...
Methods Of Forming Patterns Using Photoresists
Methods Of Forming Patterns Using Photoresists |
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12/10/2015 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
14959601
20160170304 |
Methods of forming patterns using photoresist polymers and methods of ma...
Methods of forming patterns using photoresist polymers and methods of ma... |
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12/10/2015 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
14959601
20160170304
9842852 |
Methods of forming patterns using photoresist polymers and methods of ma...
Methods of forming patterns using photoresist polymers and methods of ma...
Methods Of Forming Patterns Using Photoresist Polymers And Methods Of Ma... |
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4/22/2015 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
14692330
20160049306
9412604 |
Methods of Manufacturing Semiconductor Device
Transport Tank
Methods of Manufacturing Semiconductor Device |
|
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10/21/2014 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
14519813
20150243520
9520289 |
Control Device For Machine Tool Including Rotary Indexing Device
Methods Of Forming A Pattern Of A Semiconductor Device
Methods Of Forming A Pattern Of A Semiconductor Device |
|
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7/11/2014 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
14328283
20150104945
9564325 |
Label Tag Dispenser
Methods Of Fabricating A Semiconductor Device
Methods Of Fabricating A Semiconductor Device |
|
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6/10/2014 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
14299495
20150093897
9147687 |
Methods Of Fabricating Semiconductor Devices
Methods of Fabricating Semiconductor Devices
Methods of Fabricating Semiconductor Devices |
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2/11/2014 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
14177278
20140327894
9482953 |
Variable Diversity Rx Bandwidth For Self-organizing Networks
Lithography Apparatus Having Effective Thermal Electron Enhancement Unit...
Lithography Apparatus Having Effective Thermal Electron Enhancement Unit... |
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8/8/2013 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
13962173
20140045335
9158204 |
Photo Lithographic Rinse Solution And Method Of Manufacturing A Semicond...
Photo Lithographic Rinse Solution And Method Of Manufacturing A Semicond...
Photo Lithographic Rinse Solution And Method Of Manufacturing A Semicond... |
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7/11/2013 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
13939664
20150017808
8999840 |
Method Of Forming Fine Patterns Of Semiconductor Device
Method Of Forming Fine Patterns Of Semiconductor Device
Control Device For Internal Combustion Engine |
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11/1/2011 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
13286640
20120115331
8557131 |
Methods Of Forming Fine Patterns And Methods Of Fabricating Semiconducto...
Methods Of Forming Fine Patterns And Methods Of Fabricating Semiconducto...
Methods Of Forming Fine Patterns And Methods Of Fabricating Semiconducto... |
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2/4/2008 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
11978718
20080124931
7892982 |
Method For Forming Fine Patterns Of A Semiconductor Device Using A Doubl...
Method For Forming Fine Patterns Of A Semiconductor Device Using A Doubl...
Method For Forming Fine Patterns Of A Semiconductor Device Using A Doubl... |
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2/4/2008 |
Samsung Electronics Company Ltd. |
Assignee |
Application
Publication
Patent |
11978719
20080131793
7998874 |
Method For Forming Hard Mask Patterns Having A Fine Pitch And Method For...
Method For Forming Hard Mask Patterns Having A Fine Pitch And Method For...
Method For Forming Hard Mask Patterns Having A Fine Pitch And Method For... |
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9/4/2007 |
Samsung Electronics Company, Ltd |
Assignee |
Application
Publication
Patent |
11896512
20080200026
7687369 |
Method Of Forming Fine Metal Patterns For A Semiconductor Device Using A...
Method Of Forming Fine Metal Patterns For A Semiconductor Device Using A...
Method Of Forming Fine Metal Patterns For A Semiconductor Device Using A... |
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3/23/2007 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
11727124
20080090419
7732341 |
Method Of Forming A Hard Mask And Method Of Forming A Fine Pattern Of Se...
Method Of Forming A Hard Mask And Method Of Forming A Fine Pattern Of Se...
Method Of Forming A Hard Mask And Method Of Forming A Fine Pattern Of Se... |
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2/6/2007 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
11702841
20070197014 |
Method of fabricating semiconductor device
Method of fabricating semiconductor device |
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1/23/2007 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
11656467
20070181828
7723702 |
E-beam Lithography System For Synchronously Irradiating A Plurality Of P...
E-beam Lithography System For Synchronously Irradiating A Plurality Of P...
E-beam Lithography System For Synchronously Irradiating A Plurality Of P... |
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11/9/2006 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
11594808
20070111441
7560768 |
Nonvolatile Memory Device And Method Of Manufacturing The Same
Nonvolatile Memory Device And Method Of Manufacturing The Same
Nonvolatile Memory Device And Method Of Manufacturing The Same |
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10/31/2006 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
11590207
20080067550
7787301 |
Flash Memory Device Using Double Patterning Technology And Method Of Man...
Flash Memory Device Using Double Patterning Technology And Method Of Man...
Flash Memory Device Using Double Patterning Technology And Method Of Man... |
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10/30/2006 |
Samsung Electronics Company, Ltd |
Assignee |
Application
Publication |
11554324
20080076070 |
Methods of Forming Fine Patterns In Integrated Circuits Using Atomic Lay...
Methods of Forming Fine Patterns In Integrated Circuits Using Atomic Lay... |
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10/30/2006 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
11589372
20080057610
7452825 |
Method Of Forming A Mask Structure And Method Of Forming A Minute Patter...
Method Of Forming A Mask Structure And Method Of Forming A Minute Patter...
Method Of Forming A Mask Structure And Method Of Forming A Minute Patter... |
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9/29/2006 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
11529310
20070077524
7862988 |
Method For Forming Patterns Of Semiconductor Device
Method For Forming Patterns Of Semiconductor Device
Method For Forming Patterns Of Semiconductor Device |
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9/25/2006 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication |
11525965
20070178391 |
Mask having balance pattern and method of patterning photoresist using t...
Mask having balance pattern and method of patterning photoresist using t... |
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5/8/2006 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
11429071
20070020565
7540970 |
Methods Of Fabricating A Semiconductor Device
Methods Of Fabricating A Semiconductor Device
Methods Of Fabricating A Semiconductor Device |
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12/8/2005 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
11296921
20060131576
7582899 |
Semiconductor Device Having Overlay Measurement Mark And Method Of Fabri...
Semiconductor Device Having Overlay Measurement Mark And Method Of Fabri...
Semiconductor Device Having Overlay Measurement Mark And Method Of Fabri... |
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9/2/2005 |
Samsung Electronics |
Assignee |
Application
Publication
Patent |
11145535
20050282092
7575855 |
Method Of Forming Pattern
Method Of Forming Pattern
Method Of Forming Pattern |
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5/26/2005 |
Samsung Electronics Company, Ltd. |
Assignee |
Application
Publication
Patent |
11137451
20050266356
7387869 |
Method Of Forming Pattern For Semiconductor Device
Method Of Forming Pattern For Semiconductor Device
Method Of Forming Pattern For Semiconductor Device |
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2/3/2003 |
Hynix Semiconductor Inc. |
Assignee |
Application
Publication
Patent |
10174497
20030108815
6984482 |
Top-coating Composition For Photoresist And Process For Forming Fine Pat...
Top-coating Composition For Photoresist And Process For Forming Fine Pat...
Top-coating Composition For Photoresist And Process For Forming Fine Pat... |
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